Method of forming a gate electrode in a semiconductor device

Details Method of forming a gate electrode in a semiconductor device Method of forming a gate electrode in a semiconductor device

2000-11-27

2003-02-04

Nguyen, Tuan H. (Department: 2813)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S197000, C438S240000, C438S585000

Reexamination Certificate

active

06514826

ABSTRACT:

CROSS-REFERENCE TO RELATED APPLICATION
Priority is claimed from Republic of Korean Patent Application No. 99-60557 filed Dec. 22, 1999, which is incorporated in its entirety by reference.
BACKGROUND OF THE INVENTION
1. Field of the Invention
The invention relates generally to a method of forming a gate electrode in a semiconductor device. More particularly, the present invention relates to a method of forming a gate electrode in a semiconductor device by which (TiO
2
)
x
(Al
2
O
3
)
1-x
, wherein x has a value ranging from approximately 0.05 to approximately 0.85, in which a titanium oxide film (TiO
2
) having a high dielectric constant and leakage characteristic and an aluminum oxide film having a good interfacial property are mixed, is used as a gate insulating film.
2. Description of the Prior Art
In a semiconductor device such as DRAM, logic, etc. that has been mass-produced presently, a silicon oxide film (SiO
2
) grown by thermal process or a rapid thermal process is mainly used as a gate insulating layer. As the design rule is scaled downed, however, the thickness of the silicon oxide film is scaled down below approximately 25 to approximately 30 A being a limit to the tunneling. Thus, it is expected that the gate insulating film of 0.1 &mgr;m technology will result in approximately 15 to approximately 20 A in thickness. Due to the off current increased by direct tunneling, however, there is a possibility that it may adversely affect the operation of a device. Particularly, in case of a memory device, every effort to reduce the leakage current has been made. Recently, as a result of these efforts, many researches into attempt to adopt an insulating material having a high dielectric constant as a gate insulting film have been carried out. Among them, a research by which an tantalum oxide film (Ta
2
O
5
) used as a dielectric film of a capacitor is used as a gate insulating film had been mostly actively carried out. However, if the tantalum oxide film is used as the gate insulating film and a polysilicon film is used as the gate electrode, due to reaction between the tantalum oxide film and the polysilicon film in an interface between the tantalum oxide film and the polysilicon oxide film, a silicon oxide film is formed, resulting in increase in the thickness of the entire oxide film. At this time, in order to prevent this reaction, a metal structure of a barrier metal layer such as TiN and tungsten may be used. In this case, however, as variations such as the threshold voltage shift, etc. are caused, various types of optimization such as counter doping within a channel, etc. are required. Therefore, it is found that there is a limit to applying the conventional technology.
On the other hand, it was found that a dielectric film or a gate insulating film of a capacitor using an aluminum oxide film (Al
2
O
3
), that has been recently researched actively, has a good leakage current characteristic of <10-9A/cm
2
and a god interfacial property (D
it
<1×10
11
eV
−1
cm
−1
). Also, it shows a preferred effect and a stable characteristic during process at high temperature. Meanwhile, in case of a titanium oxide film (TiO
2
) having a dielectric constant of about 25 about 3 5, it has a high dielectric constant, but has a drawback that it has a high leakage current since bulk traps or interface defects within a thin film are great.
SUMMARY OF THE INVENTION
In order to accomplish the above object, a method of forming a gate electrode in a semiconductor device according to the present invention is characterized in that it comprises the steps of forming a (TiO
2
)
x
(Al
2
O
3
)
1-x
film on a semiconductor substrate, forming a conductive film on the entire structure and patterning the conductive film and the (TiO
2
)
x
(Al
2
O
3
)
1-x
film to form a gate electrode.


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