Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1992-11-12
1997-05-06
Chu, John S.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430197, 4302871, 430311, 430330, 430910, 156173, 156184, 156185, 264619, 501134, G03F 730, G03F 740
Patent
active
056270135
ABSTRACT:
For forming a fine pattern of ferroelectric film without using a resist, a solution containing polyalkoxide having ferroelectric components, as a base part, and functional groups to be activated when exposed to electromagnetic waves or corpuscular beams is used as a pattern forming agent. The pattern form agent is coated onto a substrate, and then electromagnetic or corpuscular beams are radiated thereover to form crosslinks between molecules in the agent. After the crosslinks are cured, the portions devoid of any crosslink and hence uncured are removed using a solvent. Then the molecules associated with the crosslinks remaining on the substrate are then heated to form a ferroelectric crystal.
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Chu John S.
Rohm & Co., Ltd.
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