Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate
2005-03-15
2005-03-15
Chen, Bret (Department: 1762)
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
C427S255340, C427S255360, C427S255700, C438S761000
Reexamination Certificate
active
06866890
ABSTRACT:
A method of forming a dielectric film on a Si substrate comprises the steps of adsorbing a gaseous molecular compound of a metal element constituting a dielectric material on a Si substrate, and causing a decomposition of the gaseous molecular compound thus adsorbed by a hydrolysis process or pyrolytic decomposition process or an oxidation process.
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Aoyama Shintaro
Kiryu Hideki
Shinriki Hiroshi
Takahashi Tsuyoshi
Chen Bret
Crowell & Moring LLP
Tokyo Electron Limited
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