4. Cleaning and liquid contact with solids
  5. Processes
  6. Including application of electrical radiant or wave energy...

Hideki Kiryu

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Method and system for forming a stacked gate insulating film

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method of forming a dielectric film

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Processing apparatus and processing method

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2556223

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