Method of forming a conductive structure in a semiconductor...

Details Method of forming a conductive structure in a semiconductor... Method of forming a conductive structure in a semiconductor...

2009-05-04

2010-12-07

Garber, Charles D (Department: 2812)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C257SE21295, C257SE21409

Reexamination Certificate

active

07846836

ABSTRACT:
A method of forming a conductive structure in a semiconductor device includes forming a conductive layer on a substrate, forming a conductive layer pattern on the substrate by patterning the conductive layer, forming an oxide layer on the substrate and a portion of the conductive layer, and forming a capping layer on the oxide layer and the conductive layer pattern.

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