Method of forming a channel

Details Method of forming a channel Method of forming a channel

1985-10-21

1989-07-04

Kittle, John E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430324, 430325, 430326, 430394, 372 48, 372 96, G03C 500

Patent

active

048450146

ABSTRACT:
A method of forming a variable width channel in a body comprises the steps of forming a surface grating having a photoresist layer thereon. The photoresist layer has a plurality of depressions and a planar photomask is then positioned over the photoresist layer. The photoresist layer is subsequently exposed and developed and due to the divergence of light into the depressions covered by the photomask, forms a variable width opening. A portion of the body exposed in the opening is removed to form a channel with a sidewall having a surface contour corresponding to an edge of the opening.

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Abita, Joseph L. "Improved Conventional Photolithography by Relief Mask Processing", Solid State Technology, pp. 48-49, Jun. 1974.
D. Marcuse, Light Transmission Optics, Chapter 2, "Diffraction Theory", Van Nostrand Reinhold Company, 1972, pp. 30-31.

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