Method of fabricating suspended single crystal silicon micro ele

Details Method of fabricating suspended single crystal silicon micro ele Method of fabricating suspended single crystal silicon micro ele

1998-01-08

2000-06-13

Niebling, John F.

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

438 48, 438 24, H01L 2100

Patent

active

060748907

ABSTRACT:
A method of fabricating MEMS devices having a master/slave structure in which the motion of a signal device is slaved to a control device through the fabrication of a mechanical coupler. The preferred fabrication uses a backside dry etch to release the suspended MEMS devices and mechanical coupler.

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