Optical: systems and elements
Deflection using a moving element
By moving a reflective element
Inventor
active
Method and apparatus for optical code reading using a MEM optica
Method for fabricating microelectromechanical system (MEMS)...
Method for fabricating microelectromechanical system (MEMS)...
Method of fabricating suspended single crystal silicon micro ele
Micro-electromechanical (MEM) optical resonator and method
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