Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2006-11-14
2006-11-14
Wojciechowicz, Edward (Department: 2815)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S205000, C438S234000, C438S353000, C438S355000, C438S356000, C438S357000, C438S416000, C257S499000, C257S565000
Reexamination Certificate
active
07135364
ABSTRACT:
The lateral pnp transistor encompasses a p-type semiconductor substrate, an n-type first buried region disposed on the semiconductor substrate, an n-type uniform base region disposed on the first buried region, an n-type first plug region disposed in the uniform base region, a p-type first emitter region and a first collector region disposed in and at the top surface of the uniform base region, a graded base region disposed in the uniform base region and a first base contact region disposed in the first plug region. The graded base region encloses the bottom and the side of the first main electrode region. The doping profile in the graded base region intervening between the first emitter region and the first collector region is such that the impurity concentration is gradually decreases towards the second main electrode region from the first main electrode region.
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Michael P. Masquelier and David N. Okada, Institute of Electrical and Electronics Engineers, “Integration of a 200V, 60MHz Lateral PNP Transistor with Emitter-Base Self-Aligned to Polysilicon, into a High Voltage BiCMOS Process”, Proceedings of the 3rdInternational Symposium on Power Semiconductor Devices and ICs, pp. 56-60, XP000216972, 1991 IEEE , Apr. 22-24, 1991, Baltimore, Maryland, USA.
Iwabuchi Akio
Yamamoto Makoto
Holmes Brenda O.
Kilpatrick & Stockton LLP
Sanken Electric Co. Ltd.
Wojciechowicz Edward
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