Method of fabricating semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C438S199000, C257SE21296

Reexamination Certificate

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07972958

ABSTRACT:
Provided is a method of fabricating a semiconductor device including a dual silicide process. The method may include sequentially siliciding and stressing a first MOS region, and sequentially siliciding and stressing a second MOS region after siliciding and stressing the first MOS region, the second MOS region being a different type than the first MOS region.

REFERENCES:
patent: 7064025 (2006-06-01), Fang et al.
patent: 7741220 (2010-06-01), Iinuma
patent: 2006/0128086 (2006-06-01), Chidambarrao et al.
patent: 2008/0116521 (2008-05-01), Lee et al.
patent: 2003-060076 (2003-02-01), None
patent: 10-2005-0078104 (2005-08-01), None
patent: 10-2007-0039384 (2007-04-01), None

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