Method of fabricating semiconductor

Details Method of fabricating semiconductor Method of fabricating semiconductor

1998-01-21

1999-09-07

Brown, Peter Toby

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

438228, 438229, 438233, 438587, 257371, 148DIG26, H01L 218238

Patent

active

059500816

ABSTRACT:
A method of fabricating a semiconductor device. The procedure of fabricating process is performed inversely as the conventional method. Less numbers of photolithography process is performed with the application of selective liquid phase deposition.

REFERENCES:
patent: 5244835 (1993-09-01), Hachiya

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