Method of fabricating oxide semiconductor device

Details Method of fabricating oxide semiconductor device Method of fabricating oxide semiconductor device

2006-08-24

2008-12-23

Le, Thao P. (Department: 2818)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S149000

Reexamination Certificate

active

07468304

ABSTRACT:
A method for fabricating a device using an oxide semiconductor, including a process of forming the oxide semiconductor on a substrate and a process of changing the conductivity of the oxide semiconductor by irradiating a predetermined region thereof with an energy ray.

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