Method of fabricating micro-lens and method of fabricating...

Details Method of fabricating micro-lens and method of fabricating... Method of fabricating micro-lens and method of fabricating...

2003-12-12

2008-08-12

McPherson, John A. (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

C430S330000, C385S014000, C385S033000, C385S035000

Reexamination Certificate

active

07410749

ABSTRACT:
A method of fabricating a micro-lens, and a method of fabricating an optical module using the method are provided. To fabricate a micro-lens, a thin film is formed of a material for the micro-lens on a substrate. A photoresist pattern is formed on the thin film, a thin-film structure is formed by etching the thin film using the photoresist pattern, and the micro-lens is completed by reflow by thermally treating the thin-film structure.

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patent: 07-027947 (1995-01-01), None
patent: 09-166728 (1997-06-01), None
patent: 2004-101783 (2004-04-01), None

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