Method of fabricating isolated semiconductor devices in...

Details Method of fabricating isolated semiconductor devices in... Method of fabricating isolated semiconductor devices in...

2006-04-05

2008-11-04

Graybill, David E (Department: 2822)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S200000, C438S218000, C438S223000, C438S228000, C438S297000, C438S305000, C438S369000, C438S510000

Reexamination Certificate

active

07445979

ABSTRACT:
An structure for electrically isolating a semiconductor device is formed by implanting dopant into a semiconductor substrate that does not include an epitaxial layer. Following the implant the structure is exposed to a very limited thermal budget so that dopant does not diffuse significantly. As a result, the dimensions of the isolation structure are limited and defined, thereby allowing a higher packing density than obtainable using conventional processes which include the growth of an epitaxial layer and diffusion of the dopants. In one group of embodiments, the isolation structure includes a deep layer and a sidewall and which together form a cup-shaped structure surrounding an enclosed region in which the isolated semiconductor device may be formed. The sidewalls may be formed by a series of pulsed implants at different energies, thereby creating a stack of overlapping implanted regions.

REFERENCES:
patent: 3767487 (1973-10-01), Steinmaier
patent: 3891469 (1975-06-01), Moriyama et al.
patent: 4156289 (1979-05-01), Hoffmann et al.
patent: 4466178 (1984-08-01), Soclof
patent: 4987093 (1991-01-01), Teng et al.
patent: 5019520 (1991-05-01), Komori et al.
patent: 5055417 (1991-10-01), Akcasu
patent: 5108783 (1992-04-01), Tanigawa et al.
patent: 5160996 (1992-11-01), Odanaka
patent: 5212109 (1993-05-01), Mihara
patent: 5286995 (1994-02-01), Malhi
patent: 5358883 (1994-10-01), Burger et al.
patent: 5420061 (1995-05-01), Manning
patent: 5478759 (1995-12-01), Mametani et al.
patent: 5478761 (1995-12-01), Komori et al.
patent: 5496750 (1996-03-01), Moslehi
patent: 5510993 (1996-04-01), Williams et al.
patent: 5569620 (1996-10-01), Linn et al.
patent: 5573963 (1996-11-01), Sung
patent: 5612242 (1997-03-01), Hsu
patent: 5643822 (1997-07-01), Furukawa et al.
patent: 5668755 (1997-09-01), Hidaka
patent: 5691225 (1997-11-01), Abiko
patent: 5693505 (1997-12-01), Kobayashi
patent: 5698458 (1997-12-01), Hsue et al.
patent: 5798295 (1998-08-01), Hoover et al.
patent: 5811334 (1998-09-01), Buller et al.
patent: 5817546 (1998-10-01), Ferla et al.
patent: 5817551 (1998-10-01), Fujii et al.
patent: 5856003 (1999-01-01), Chiu
patent: 5888861 (1999-03-01), Chien et al.
patent: 5898007 (1999-04-01), Lee
patent: 5930642 (1999-07-01), Moore et al.
patent: 5966599 (1999-10-01), Walker et al.
patent: 5976921 (1999-11-01), Maeda
patent: 6017787 (2000-01-01), Chittipeddi et al.
patent: 6054374 (2000-04-01), Gardner et al.
patent: 6072216 (2000-06-01), Williams et al.
patent: 6083798 (2000-07-01), Lin
patent: 6090691 (2000-07-01), Ang et al.
patent: 6096625 (2000-08-01), Daniel et al.
patent: 6177333 (2001-01-01), Rhodes
patent: 6184557 (2001-02-01), Poplevine et al.
patent: 6251757 (2001-06-01), Yu
patent: 6297119 (2001-10-01), Tsutsui et al.
patent: 6331456 (2001-12-01), Wu
patent: 6359317 (2002-03-01), Carroll et al.
patent: 6365447 (2002-04-01), H'erbert et al.
patent: 6391700 (2002-05-01), Tsay
patent: 6391754 (2002-05-01), Paranjpe
patent: 6406974 (2002-06-01), Wu et al.
patent: 6413827 (2002-07-01), Farrar
patent: 6476457 (2002-11-01), Oh
patent: 6495896 (2002-12-01), Yaegashi et al.
patent: 6501131 (2002-12-01), Divakaruni et al.
patent: 6511884 (2003-01-01), Quek et al.
patent: 6528375 (2003-03-01), Gregory
patent: 6586297 (2003-07-01), U'Ren et al.
patent: 6599782 (2003-07-01), Kikuchi et al.
patent: 6617217 (2003-09-01), Nandakumar et al.
patent: 6630699 (2003-10-01), Wylie
patent: 6657262 (2003-12-01), Patti
patent: 6657276 (2003-12-01), Karlsson et al.
patent: 6661042 (2003-12-01), Hsu
patent: 6680230 (2004-01-01), Arai et al.
patent: 6682966 (2004-01-01), Iwata et al.
patent: 6686252 (2004-02-01), Logan et al.
patent: 6885080 (2005-04-01), Chen et al.
patent: 6897520 (2005-05-01), Vora
patent: 6900091 (2005-05-01), Williams et al.
patent: 2002/0098638 (2002-07-01), Yaegashi et al.
patent: 2002/0142551 (2002-10-01), Park et al.
patent: 2002/0177253 (2002-11-01), Johnson et al.
patent: 2002/0192917 (2002-12-01), Wylie
patent: 2004/0014271 (2004-01-01), Cantell et al.
patent: 2004/0033666 (2004-02-01), Williams et al.
patent: 2004/0259318 (2004-12-01), Williams et al.
patent: 2005/0014324 (2005-01-01), Williams et al.
patent: 2005/0014329 (2005-01-01), Williams et al.
patent: 2005/0142724 (2005-06-01), Williams et al.
patent: 2005/0142791 (2005-06-01), Williams et al.
patent: 2005/0142792 (2005-06-01), Williams et al.
patent: 2005/0158939 (2005-07-01), Williams et al.
patent: 2006/0223257 (2006-10-01), Williams et al.
patent: 1357598 (2003-10-01), None
patent: 2320812 (1998-07-01), None
patent: 2000 114361 (2000-04-01), None
patent: WO 02/052649 (2002-07-01), None
patent: WO 03/054950 (2003-07-01), None
Contiero et al., “LDMOS Implemenatation By Large Tilt Implant In 0.6 μm BCD5 Process, Flash Memory Compatible,” IEEE (1996) pp. 75-78.
Kuroi et al., “Bipolar Transistor with a Buried Layer Formed by High-Energy Ion Implantation for Subhalf-Micron Bipolar-Complementary Metal Oxide Semiconductor LSIs,” Jpn. J. Appl. Phys., vol. 33 (1994) No. 1B, Jan. 1994, pp. 541-545.

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