Method of fabricating gradient index optical films

Details Method of fabricating gradient index optical films Method of fabricating gradient index optical films

1989-09-06

1991-03-19

Rosenberger, Richard A.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356381, 250560, G01B 1106, G01N 2186

Patent

active

050005758

ABSTRACT:
A method is provided for monitoring and controlling the deposition of an optical thin film having a refractive index gradient. The optical material to be deposited is evaporated at a controllable rate. In a coevaporation process, evaporation of material having a lower index of refraction is generally held at a predetermined rate while evaporation of material having a higher index of refraction is controllable. During deposition, the film and substrate are illuminated by a broadband light source. The incident light reflected by the film and substrate produces an interference pattern comprising a reflectance spectrum that is detected to compute an optical thickness estimate of the film. The detected reflectance is compared to a reflectance specified for that optical thickness by a predetermined refractive index profile of the desired film. The controllable rate of evaporation is then adjusted so that the refractive index of the material being deposited conforms to the predetermined profile.

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