Method of fabricating an overvoltage protection device in integr

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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438672, 438467, 438134, H01L 218234

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active

058113304

ABSTRACT:
An overvoltage protection device, for inclusion within an integrated circuit, which comprises at least two conductive elements separated by a gas filled gap.

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French Search Report from French Patent Application 94 03302, filed Mar. 14, 1994.
Institute of Electrical and Electronics Engineers, 11th Annual Proceedings Reliability Physics; New York, Apr. 1973, Las Vegas Nevada, USA, pp. 198-202, L.W. Linholm et al. "Electrostatic Gate Protection Using and ARC Gap Device".
Patent Abstracts of Japan, vol. 9, No. 154 (E-325) Jun. 28, 1985 & JP-A-60 034 053 (Nippon Denki).
Patent Abstracts of Japan, vol. 10, No. 384 (E-466) Dec. 23, 1986 & JP-A-61 174 727 (Toshiba).

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