Method of etching ferroelectric layers

Details Method of etching ferroelectric layers Method of etching ferroelectric layers

2005-09-13

2005-09-13

Chaudhuri, Olik (Department: 2824)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

C438S733000, C438S734000, C438S695000

Reexamination Certificate

active

06943039

ABSTRACT:
Method of etching a ferroelectric layer includes etching an upper electrode and partially through a ferroelectric layer. A dielectric material is subsequently deposited upon the upper electrode and the partially etched ferroelectric layer. A second etch step completely etches through the remaining portion of the ferroelectric layer and also etches lower electrodes. A random access memory apparatus is constructed that includes a first conductive layer, a dielectric layer disposed upon the first conductive layer, a second conductive layer disposed upon the dielectric layer, where such layers form a stack having a sidewall. Further, the sidewall has a protective dielectric film disposed thereon and extending from the second layer down to the dielectric layer.

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