Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate
2007-07-31
2007-07-31
Baumeister, B. William (Department: 2891)
Semiconductor device manufacturing: process
With measuring or testing
Electrical characteristic sensed
C438S014000, C257SE21525, C257SE21531
Reexamination Certificate
active
10954528
ABSTRACT:
A current-voltage response of at least one site of a semiconductor wafer where ions have been implanted in the semiconducting material of the semiconductor wafer is measured prior to annealing the semiconductor wafer. From the measured response, a determination is made whether the ion implantation is within acceptable tolerance(s).
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Baumeister B. William
Solid State Measurements, Inc.
Such Matthew W.
The Webb Law Firm
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