Method of design based process control optimization

Details Method of design based process control optimization Method of design based process control optimization

2005-11-02

2009-08-04

Dinh, Paul (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000, C716S030000, C716S030000

Reexamination Certificate

active

07571397

ABSTRACT:
The present invention provides a method of design based process control optimization. In an embodiment, the method of design based process control optimization includes creating a circuit layout database including a design rule set. At least one algorithm is employed to query the circuit layout database to calculate at least one process specification limit. The method includes comparing the calculated at least one process specification limit with at least one predefined technology process tool capability to determine if the calculated at least one process specification limit allows for a manufacturable process. If the calculated at least one process specification limit does not allow for the manufacturable process, the limit may be re-optimized.

REFERENCES:
patent: 2006/0236296 (2006-10-01), Melvin et al.
patent: 2007/0099313 (2007-05-01), Hanson et al.

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