Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate
2005-06-14
2005-06-14
Pianalto, Bernard (Department: 1762)
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
C427S249100, C427S252000, C427S255150, C427S255180, C427S255280, C427S255310, C427S255320, C427S255394, C427S255395, C427S419200, C427S419300, C427S419700, C427S575000, C427S579000
Reexamination Certificate
active
06905737
ABSTRACT:
A method for providing activated species for a cyclical deposition process is provided. In one aspect, the method includes delivering a gas to be activated into a plasma generator, activating the gas to create a volume of reactive species, delivering a fraction of the reactive species into a processing region to react within a substrate therein, and maintaining at least a portion of the the gas remaining in the plasma generator in an activated state after delivering the fraction of the gas into the process region. The plasma generator may include a high density plasma (HDP) generator, a microwave generator, a radio-frequency (RF) generator, an inductive-coupled plasma (ICP) generator, a capacitively coupled generator, or combinations thereof.
REFERENCES:
patent: 4058430 (1977-11-01), Suntola et al.
patent: 4389973 (1983-06-01), Suntola et al.
patent: 4413022 (1983-11-01), Suntola et al.
patent: 4834831 (1989-05-01), Nishizawa et al.
patent: 4993357 (1991-02-01), Scholz
patent: 5225366 (1993-07-01), Yoder
patent: 5281274 (1994-01-01), Yoder
patent: 5294286 (1994-03-01), Nishizawa et al.
patent: 5374570 (1994-12-01), Nasu et al.
patent: 5441703 (1995-08-01), Jurgensen
patent: 5443647 (1995-08-01), Aucoin et al.
patent: 5480818 (1996-01-01), Matsumoto et al.
patent: 5483919 (1996-01-01), Yokoyama et al.
patent: 5503875 (1996-04-01), Imai et al.
patent: 5674786 (1997-10-01), Turner et al.
patent: 5711811 (1998-01-01), Suntola et al.
patent: 5796116 (1998-08-01), Nakata et al.
patent: 5807792 (1998-09-01), Ilg et al.
patent: 5835677 (1998-11-01), Li et al.
patent: 5855680 (1999-01-01), Soininen et al.
patent: 5879459 (1999-03-01), Gadgil et al.
patent: 5916365 (1999-06-01), Sherman
patent: 5923056 (1999-07-01), Lee et al.
patent: 6013553 (2000-01-01), Wallace et al.
patent: 6015590 (2000-01-01), Suntola et al.
patent: 6015917 (2000-01-01), Bhandari et al.
patent: 6042652 (2000-03-01), Hyun et al.
patent: 6060755 (2000-05-01), Ma et al.
patent: 6084302 (2000-07-01), Sandhu
patent: 6124158 (2000-09-01), Dautartas et al.
patent: 6139700 (2000-10-01), Kang et al.
patent: 6143659 (2000-11-01), Leem
patent: 6144060 (2000-11-01), Park et al.
patent: 6162501 (2000-12-01), Kim
patent: 6174377 (2001-01-01), Doering et al.
patent: 6174809 (2001-01-01), Kang et al.
patent: 6183563 (2001-02-01), Choi et al.
patent: 6197683 (2001-03-01), Kang et al.
patent: 6200893 (2001-03-01), Sneh
patent: 6203613 (2001-03-01), Gates et al.
patent: 6207487 (2001-03-01), Kim et al.
patent: 6231672 (2001-05-01), Choi et al.
patent: 6238734 (2001-05-01), Senzaki et al.
patent: 6270572 (2001-08-01), Kim et al.
patent: 6284646 (2001-09-01), Leem
patent: 6287965 (2001-09-01), Kang et al.
patent: 6297539 (2001-10-01), Ma et al.
patent: 6305314 (2001-10-01), Sneh et al.
patent: 6306216 (2001-10-01), Kim et al.
patent: 6342277 (2002-01-01), Sherman
patent: 6348376 (2002-02-01), Lim et al.
patent: 6358829 (2002-03-01), Yoon et al.
patent: 6372598 (2002-04-01), Kang et al.
patent: 6379748 (2002-04-01), Bhandari et al.
patent: 6391785 (2002-05-01), Satta et al.
patent: 6391803 (2002-05-01), Kim et al.
patent: 6399491 (2002-06-01), Jeon et al.
patent: 6416577 (2002-07-01), Suntoloa et al.
patent: 6416822 (2002-07-01), Chiang et al.
patent: 6428859 (2002-08-01), Chiang et al.
patent: 6447607 (2002-09-01), Soininen et al.
patent: 6451119 (2002-09-01), Sneh et al.
patent: 6451695 (2002-09-01), Sneh
patent: 6468924 (2002-10-01), Lee et al.
patent: 6475276 (2002-11-01), Elers et al.
patent: 6475910 (2002-11-01), Sneh
patent: 6478872 (2002-11-01), Chae et al.
patent: 6481945 (2002-11-01), Hasper et al.
patent: 6482262 (2002-11-01), Elers et al.
patent: 6482733 (2002-11-01), Raaijmakers
patent: 6482740 (2002-11-01), Soininen et al.
patent: 6492283 (2002-12-01), Raaijmakers et al.
patent: 6511539 (2003-01-01), Raaijmakers
patent: 6551406 (2003-04-01), Kilpi
patent: 2001/0000866 (2001-05-01), Sneh et al.
patent: 2001/0002280 (2001-05-01), Sneh
patent: 2001/0009140 (2001-07-01), Bondestan et al.
patent: 2001/0009695 (2001-07-01), Saanila et al.
patent: 2001/0011526 (2001-08-01), Doering et al.
patent: 2001/0013312 (2001-08-01), Soininen et al.
patent: 2001/0014371 (2001-08-01), Kilpi
patent: 2001/0024387 (2001-09-01), Raaijmakers et al.
patent: 2001/0028924 (2001-10-01), Sherman
patent: 2001/0041250 (2001-11-01), Werkhoven et al.
patent: 2001/0042523 (2001-11-01), Kesala
patent: 2001/0042799 (2001-11-01), Kim et al.
patent: 2001/0050039 (2001-12-01), Park
patent: 2001/0054377 (2001-12-01), Lindfors et al.
patent: 2001/0054730 (2001-12-01), Kim et al.
patent: 2002/0000196 (2002-01-01), Park
patent: 2002/0000598 (2002-01-01), Kang et al.
patent: 2002/0001974 (2002-01-01), Chan
patent: 2002/0007790 (2002-01-01), Park
patent: 2002/0015790 (2002-02-01), Baum et al.
patent: 2002/0020869 (2002-02-01), Park et al.
patent: 2002/0021544 (2002-02-01), Cho et al.
patent: 2002/0025979 (2002-02-01), Kunz et al.
patent: 2002/0031618 (2002-03-01), Sherman
patent: 2002/0034123 (2002-03-01), Fuengeld
patent: 2002/0041931 (2002-04-01), Suntola et al.
patent: 2002/0042165 (2002-04-01), Putkonen
patent: 2002/0047151 (2002-04-01), Kim et al.
patent: 2002/0048635 (2002-04-01), Kim et al.
patent: 2002/0052097 (2002-05-01), Park
patent: 2002/0054769 (2002-05-01), Nakamura
patent: 2002/0066411 (2002-06-01), Chiang et al.
patent: 2002/0068458 (2002-06-01), Chiang et al.
patent: 2002/0073924 (2002-06-01), Chiang et al.
patent: 2002/0076481 (2002-06-01), Chiang et al.
patent: 2002/0076507 (2002-06-01), Chiang et al.
patent: 2002/0076508 (2002-06-01), Chiang et al.
patent: 2002/0076837 (2002-06-01), Hujanen et al.
patent: 2002/0081844 (2002-06-01), Jeon et al.
patent: 2002/0086106 (2002-07-01), Park et al.
patent: 2002/0092471 (2002-07-01), Kang et al.
patent: 2002/0094689 (2002-07-01), Park
patent: 2002/0098627 (2002-07-01), Pomarede et al.
patent: 2002/0104481 (2002-08-01), Chiang et al.
patent: 2002/0106451 (2002-08-01), Skarp et al.
patent: 2002/0106536 (2002-08-01), Lee et al.
patent: 2002/0108570 (2002-08-01), Lindfors et al.
patent: 2002/0115252 (2002-08-01), Haukka et al.
patent: 2002/0134307 (2002-09-01), Choi
patent: 2002/0144655 (2002-10-01), Chiang et al.
patent: 2002/0144657 (2002-10-01), Chiang et al.
patent: 2002/0146511 (2002-10-01), Chiang et al.
patent: 2002/0146895 (2002-10-01), Ramdani et al.
patent: 2002/0153579 (2002-10-01), Yamamoto
patent: 2002/0155722 (2002-10-01), Satta et al.
patent: 2002/0162506 (2002-11-01), Sneh et al.
patent: 2002/0164421 (2002-11-01), Chiang et al.
patent: 2002/0164423 (2002-11-01), Chiang et al.
patent: 2002/0177282 (2002-11-01), Song
patent: 2002/0182320 (2002-12-01), Leskela et al.
patent: 2002/0187256 (2002-12-01), Elers et al.
patent: 2002/0187631 (2002-12-01), Kim et al.
patent: 2002/0196591 (2002-12-01), Hujanen et al.
patent: 2002/0197402 (2002-12-01), Chiang et al.
patent: 2002/0197831 (2002-12-01), Todd et al.
patent: 2003/0013320 (2003-01-01), Kim et al.
patent: 2003/0031807 (2003-02-01), Elers et al.
patent: 2003/0042630 (2003-03-01), Babcoke et al.
patent: 2003/0049942 (2003-03-01), Haukka et al.
patent: 2003/0072975 (2003-04-01), Shero et al.
patent: 2003/0075273 (2003-04-01), Kilpela et al.
patent: 2003/0075925 (2003-04-01), Lindfors et al.
patent: 2003/0082296 (2003-05-01), Elers et al.
patent: 1 167 569 (2002-01-01), None
patent: 2 355 727 (2001-05-01), None
patent: 58098917 (1983-06-01), None
patent: 4291916 (1992-09-01), None
patent: 5047666 (1993-02-01), None
patent: 5206036 (1993-08-01), None
patent: 5234899 (1993-09-01), None
patent: 5270997 (1993-10-01), None
patent: 6224138 (1994-05-01), None
patent: 2000319772 (2000-03-01), None
patent: 2001020075 (2000-11-01), None
patent: 2001/111000 (2001-04-01), None
patent: 2001172767 (2001-06-01), None
patent: WO 96/17107 (1996-06-01), None
patent: WO 99/01595 (1999-01-01), None
patent: WO 99/29924 (1999-06-01), None
patent: WO 99/65064 (1999-12-01), None
patent: WO 0015865 (2000-03-01), None
patent: WO 0016377 (2000-03-01), None
patent: WO 00/54320 (2000-09-01), None
patent: WO 00/79576 (2000-12-01), None
patent: WO 01/15220 (2001-03-01), None
pate
Sinha Ashok K.
Verplancken Donald J.
Applied Materials Inc.
Moser Patterson & Sheridan LLP
Pianalto Bernard
LandOfFree
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