Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2006-04-24
2011-10-11
Jiang, Chen-Wen (Department: 3744)
Coating apparatus
Gas or vapor deposition
With treating means
C118S725000, C156S345270
Reexamination Certificate
active
08034180
ABSTRACT:
A method of controlling the temperature of a workpiece on a workpiece support in a plasma reactor includes placing coolant in a flow channel thermally coupled to the workpiece support, supporting a thermally conductive gas between the workpiece and the workpiece support to establish a backside gas pressure, providing sensors to measure the temperature of the workpiece support and the workpiece, and determining whether the rate of change in workpiece temperature is less or more than a rate limited by a thermal mass of the workpiece support. If the rate is less or equal, the thermal conditions of the coolant in the flow channel are changed to reduce a difference between the measured workpiece support temperature and a target workpiece support temperature. If the rate is more, the pressure of the thermally conductive gas is changed to reduce a difference between the measured workpiece temperature and a target workpiece temperature.
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Official Action
Bera Kallol
Brillhart Paul Lukas
Buchberger, Jr. Douglas A.
Burns Douglas H.
Fovell Richard
Advanced Thermal Sciences Corporation
Applied Materials Inc.
Jiang Chen-Wen
Knobbe Martens Olson & Bear LLP
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