Method of controlling oxygen concentration in single crystal and

Details Method of controlling oxygen concentration in single crystal and Method of controlling oxygen concentration in single crystal and

1990-11-16

1992-07-21

Kunemund, Robert

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566171, 1566181, 1566204, 422249, C30B 1520

Patent

active

051319748

ABSTRACT:
A method for controlling an oxygen concentration of a single crystal which is pulled up in a Czochralski-method type single crystal pulling apparatus having a hermetical chamber in which the single crystal is pulled up and an inert gas supply and exhaust system by means of which an inert gas is supplied to the hermetical chamber and exhausted therefrom; the method being characterized in that the pneumatic pressure in the hermetical chamber and the supply rate of the inert gas are controlled in accordance with a prepared control pattern with respect to the proportion of the length of the as-grown crystal to the aimed final length thereof or with respect to the passage of time.

REFERENCES:
patent: 3342560 (1967-09-01), Eckhardt et al.
patent: 3556732 (1971-01-01), Chang et al.
patent: 4400232 (1983-08-01), Ownby et al.
patent: 4956153 (1990-09-01), Yamagishi et al.

Affiliated with

Also associated with

Rating

Method of controlling oxygen concentration in single crystal and does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of controlling oxygen concentration in single crystal and, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of controlling oxygen concentration in single crystal and will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-841132