Method of controlling a stage and a system such as an exposing a

Details Method of controlling a stage and a system such as an exposing a Method of controlling a stage and a system such as an exposing a

1996-09-24

1998-06-02

Sircus, Brian

Electricity: motive power systems

Positional servo systems

Multiple mode systems

318649, G05B 1118

Patent

active

057605610

ABSTRACT:
A method of controlling a stage includes the steps of setting a plurality of drive modes according to which the stage is driven, which correspond to a plurality of positioning processes for positioning an element supported by the stage, and driving the stage according to the plurality of drive modes corresponding to the plurality of positioning processes. An exposure apparatus employing such a method includes a stage mechanism on which a substrate is placed, an exposure device for exposing the substrate to light, a memory for storing data representing a plurality of drive modes according to which the stage mechanism is driven for positioning the substrate, a driver for driving the stage mechanism in accordance with the drive modes, and a controller for selecting one of the drive modes stored in the memory in accordance with a positioning process according to which the substrate is to be positioned, and for controlling the driver in accordance with the selected drive mode.

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