4. Electricity: motive power systems
  5. Positional servo systems
  6. Multiple mode systems

Hideyuki Chinju

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Method of controlling a stage and a system such as an exposing a

Electricity: motive power systems – Positional servo systems – Multiple mode systems
Patent

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Synchrotron radiation measurement apparatus, X-ray exposure...

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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Synchrotron radiation measurement apparatus, X-ray exposure...

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1481707

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