Method of classifying defects

Details Method of classifying defects Method of classifying defects

2006-05-30

2008-11-04

Stafira, Michael P (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237200

Reexamination Certificate

active

07446865

ABSTRACT:
A method of classifying defects of an object includes irradiating multi-wavelength light onto the object, splitting light reflected from the object into light beams, each of the light beams having different wavelengths, obtaining image information of the object based on each of the light beams, forming a characteristic matrix that represent the wavelengths and the image information, and analyzing the characteristic matrix to determine types of the defects on the object. Thus, the defects may be accurately classified using a difference between reactivity of each of the defects in accordance with variations of the wavelengths and inspection conditions.

REFERENCES:
patent: 6791099 (2004-09-01), Some et al.
patent: 6864971 (2005-03-01), Lin et al.
patent: 2002-116155 (2002-04-01), None
patent: 1997-7005031 (1997-09-01), None
patent: 2001-0061643 (2001-07-01), None
patent: 2002-0051990 (2002-07-01), None
patent: 2004-0076742 (2004-09-01), None
English language abstract of Korean Publication No. 2002-0051990.
English language abstract of Korean Publication No. 2004-0076742.
English language abstract of Japanese Publication No. 2002-116155.

Affiliated with

Also associated with

Rating

Method of classifying defects does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of classifying defects, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of classifying defects will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4043169