Method of and apparatus for handling crystal ingots

Details Method of and apparatus for handling crystal ingots Method of and apparatus for handling crystal ingots

1983-11-28

1985-06-18

Lacey, David L.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156DIG98, 422249, 269 17, 269 35, 269287, 414225, 414731, 414785, 414911, 294 681, 294 674, C30B 1502

Patent

active

045239720

ABSTRACT:
A semiconductor crystal ingot (14) is supportively engaged by an ingot handling apparatus (22) which contacts a base (38) of the ingot (14) with a base support (36) and opposite sides of a lateral surface of the ingot (14) with at least one pair of jaws (37). The jaws (37) are retained adjacent to but out of firm contact with the lateral surface of the ingot until after the support (36) firmly supports the weight of the ingot. The support and the at least one pair of jaws are retracted from a furnace (10) simultaneously in a lateral direction with no relative movement to withdraw the ingot from the furnace.

REFERENCES:
patent: 2827189 (1958-03-01), Knudstrup
patent: 2975036 (1961-03-01), Taylor et al.
patent: 3064840 (1962-11-01), Ilon
patent: 3768954 (1973-10-01), Marsh et al.
patent: 3938685 (1976-02-01), Walchek
patent: 4212577 (1980-07-01), Swanson
patent: 4345866 (1982-08-01), Greene
patent: 4350560 (1982-09-01), Helgeland et al.

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