Method of and apparatus for forming multi-layer film

Details Method of and apparatus for forming multi-layer film Method of and apparatus for forming multi-layer film

1993-01-13

1995-04-25

Pham, Hoa Q.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356382, 356357, 250560, G01B 1102

Patent

active

054104114

ABSTRACT:
A method of and an apparatus for forming a multi-layer film, includes: a thickness control device for controlling an optical film thickness or a thickness of each of the layers of the multi-layer film; a multi-layer film monitoring substrate on which the multi-layer film is formed; a measurement device for measuring the optical characteristics of the multi-layer film formed on the multi-layer film monitoring substrate; and a processing device which processes the results obtained by the measurement device so as to feed the processed results back to the thickness control device.

REFERENCES:
patent: 3869211 (1975-03-01), Watanabe et al.
patent: 3892490 (1975-07-01), Uetsuki et al.
patent: 4582431 (1986-04-01), Cole
Applied Optics, vol. 18, No. 12, Jun. 1979, New York, pp. 1978-1982, C. Holm, "Optical thin film production with continuous reoptimization of layer thickness", pp. 1978-1979.

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