Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent
1995-08-22
1997-10-28
Hantis, K.
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
G01B 1100
Patent
active
056822430
ABSTRACT:
A method of aligning a substrate with a predetermined reference position is disclosed. An alignment system for detecting an alignment mark formed on a substrate has a detection center. In advance of actual alignment operations, each of a plurality of different types of reference marks is positioned at the detection center, the reference marks are successively detected by means of the alignment system, and detection offset values associated with each reference mark are obtained based on the results of the detection. In an actual alignment operation, one of the reference marks that is of the type substantially the same as that of the alignment mark is determined. Then the position to which the substrate is to be moved is controlled based on i) the detection offset values corresponding to said one reference mark determined and ii) the results of the detection of the alignment mark by means of the alignment system. According to this method, the alignment mark can be detected with accuracy and the substrate can be precisely aligned with the predetermined reference position for any mark type of the alignment mark formed on the substrate.
REFERENCES:
patent: 4655598 (1987-04-01), Murakami et al.
patent: 4780617 (1988-10-01), Umatate et al.
patent: 5418613 (1995-05-01), Matsutani
Hantis K.
Nikon Corporation
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