4. Optics: measuring and testing
  5. By dispersed light spectroscopy
  6. With sample excitation

K. Hantis

Examiner

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Examiner

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Alignment apparatus and exposure apparatus equipped therewith

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Alignment method

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Alignment method

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Alignment method and apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Analytical apparatus with coded elements

Optics: measuring and testing – By shade or color – With color transmitting filter
Patent

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