Radiant energy – Inspection of solids or liquids by charged particles
Patent
1992-02-14
1993-04-20
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
250307, H01J 3700
Patent
active
052045315
ABSTRACT:
A method of adjusting the scan size of an instrument having piezoelectric scanners, such as a scanning probe microscope, including operating the instrument at a first scan size and adjusting the scan size of the instrument to a second scan size. The instrument is then precycled by scanning in each of x and y directions over substantially maximum excursions in each direction for a number of scan lines less than a complete scan of an area of the second scan size. The precycling settles the sensitivities of the piezoelectric scanners. The instrument is then operated at the second scan size to obtain data indicative of the surface of a scanned object.
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Elings Virgil B.
Gurley John A.
Berman Jack I.
Digital Instruments, Inc.
Nguyen Kiet T.
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