Method of achieving uniform length of carbon nanotubes...

Details Method of achieving uniform length of carbon nanotubes... Method of achieving uniform length of carbon nanotubes...

2006-06-23

2008-10-07

Nhu, David (Department: 2818)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

By reaction with substrate

C438S513000, C438S680000, C257SE21170, C257SE21245, C257SE21311, C257SE39006, C257SE51038, C257SE51040

Reexamination Certificate

active

07432217

ABSTRACT:
In a method of achieving uniform lengths of Carbon NanoTubes (CNTs) and a method of manufacturing a Field Emission Device (FED) using such CNTs, an organic film is coated to cover CNTs formed on a predetermined material layer. The organic film is etched to a predetermined depth to remove projected portions of the CNTs. After that, the organic film is removed.

REFERENCES:
patent: 6437503 (2002-08-01), Konuma
patent: 6774548 (2004-08-01), Fran et al.
patent: 6819041 (2004-11-01), Kajiwara
patent: 2004/0169458 (2004-09-01), Fran et al.
patent: 2005/0151195 (2005-07-01), Kawase et al.
patent: 2005/0186699 (2005-08-01), Kawase et al.
patent: 2006/0290003 (2006-12-01), Kawabata et al.

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