Method for using inspection data for improving throughput of ste

Details Method for using inspection data for improving throughput of ste Method for using inspection data for improving throughput of ste

1997-12-05

2000-08-01

Lintz, Paul R.

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

716 19, G06F 1750

Patent

active

060960930

ABSTRACT:
A method for managing stepper operations required during the manufacturing of an integrated circuit die having at least one known defect, as determined by inspection, comprises the steps of determining, based upon an analysis of the connectivity and defect information relating to the die having at least one known defect a probability of failure to each at least one known defect and eliminating from stepper operations any die having at least one fatal defect.

REFERENCES:
patent: 3751647 (1973-08-01), Maeder et al.
patent: 4706019 (1987-11-01), Richardson
patent: 5014226 (1991-05-01), Horstmann et al.
patent: 5030907 (1991-07-01), Yih et al.
patent: 5475695 (1995-12-01), Caywood et al.
patent: 5539652 (1996-07-01), Tegethoff
patent: 5777901 (1998-07-01), Berezin et al.
patent: 5808919 (1998-09-01), Preist et al.
patent: 5822218 (1998-10-01), Moosa et al.

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