Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate
2006-05-09
2006-05-09
McPherson, John A. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
C430S325000, C430S396000
Reexamination Certificate
active
07041436
ABSTRACT:
Method for the Manufacture of Micro Structures A method for the manufacture of micro structures in substrates is provided. The method uses a combination of photolithographic mask technology and micro contact printing.
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patent: 6042993 (2000-03-01), Leuschner
patent: 6653030 (2003-11-01), Jeans et al.
patent: 2001/0022704 (2001-09-01), Hong
Krause Rainer Klaus
Schmidt Markus
Abate Joseph P.
International Business Machines - Corporation
McPherson John A.
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