Method for the manufacture of micro structures

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface

Reexamination Certificate

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C430S325000, C430S396000

Reexamination Certificate

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07041436

ABSTRACT:
Method for the Manufacture of Micro Structures A method for the manufacture of micro structures in substrates is provided. The method uses a combination of photolithographic mask technology and micro contact printing.

REFERENCES:
patent: 5837426 (1998-11-01), Tseng
patent: 5901432 (1999-05-01), Armstrong et al.
patent: 6042993 (2000-03-01), Leuschner
patent: 6653030 (2003-11-01), Jeans et al.
patent: 2001/0022704 (2001-09-01), Hong

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