Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-10-02
2007-10-02
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
10931703
ABSTRACT:
The method serves for the interferometric measurement of non-rotationally symmetric wavefront errors on a specimen . The specimen is brought into a number of rotational positions, at least one measurement result being determined in each of the rotational positions and a mathematical evaluation of all measurement results is performed. The measurement results (M1. . . Mm; N1. . . Nn) of each of the measurement series (M, N) are determined respectively in mutually equidistant rotational positions of the specimen . The measurement results (M1. . . Mm, N1. . . Nn) of each of the at least two measurement series (M, N) are evaluated independently of one another for non-rotationally symmetric wavefront errors (<W>m, <W>n) on the specimen, and a difference is computationally rotated m or n times and the results averaged out. At least one of the wavefront errors (<W>m, <W>n) is corrected with the result (<<W>m-<W>n>mor <<W>m-<W>n>n) averaged in this way.
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Otto Wolfgang
Seitz Guenther
Carl Zeiss SMT AG
Turner Samuel A.
Welsh & Kratz, Ltd.
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