4. Optical: systems and elements
  5. Compound lens system
  6. With curved reflective imaging element

Guenther Seitz

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8-mirror microlithography projection objective

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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8-mirror microlithography projection objective

Optical: systems and elements – Compound lens system – With curved reflective imaging element
Reexamination Certificate

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Method for the interferometric measurement of...

Optics: measuring and testing – By light interference – For dimensional measurement
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Method of manufacturing an optical element

Abrading – Precision device or process - or with condition responsive... – By optical sensor
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Profile ID: LFUS-PAI-P-2398159

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