Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
Patent
1998-01-23
1999-08-03
Bowers, Charles
Semiconductor device manufacturing: process
Introduction of conductivity modifying dopant into...
Diffusing a dopant
438909, 438971, H01L 2100
Patent
active
059337516
ABSTRACT:
An object of the invention is to provide a method for the heat treatment of II-VI semiconductors such as ZnS, ZnS.sub.x Se.sub.1-x, Zn.sub.y Cd.sub.1-y Se, etc. to dope with Group III elements as a donor impurity to reduce its resistivity. This object can be attained by a method for the heat treatment of II-VI semiconductors in a closed vessel, which comprises forming a film of a Group III element as a donor impurity or a Group III element-containing compound on a surface of single crystal of II-VI semiconductors, then charging the single crystal and a Group II element for constituting the single crystal in the closed vessel and heating them in such a manner that the both are not contacted with each other.
REFERENCES:
patent: 3870473 (1975-03-01), Kyle
patent: 4960721 (1990-10-01), Terashima et al.
patent: 5055363 (1991-10-01), Tomomura et al.
patent: 5554877 (1996-09-01), Kitagawa et al.
Bowers Charles
Christianson Keith
Sumitomo Electric Industries Ltd.
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