Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent
1994-01-14
1996-06-11
Pham, Hoa Q.
Optics: measuring and testing
By polarized light examination
Of surface reflection
356382, 356128, 356322, G01N 2121
Patent
active
055261175
ABSTRACT:
Characteristic values of transparent layers in the nanometer range, such a layer thickness and refractive index, can be determined with a spectro-ellipsometer. The task is to determine these values even with a less elaborate ellipsometer which only operates at one or a few wavelengths. In accordance with the invention, first at least one pair of the ellipsometric angles psi and delta are measured with at least one angle of incidence of the light beams on the sample for at least one ellipsometer wavelength, from which at least one characteristic value is determined for one ellipsometer period. Furthermore, the wavelength-dependent reflection of the probe in the wavelength range of interest is photometrically measured and from this the spectral dependency of the characteristic value is determined with the ellipsometrically measured characteristic value.
REFERENCES:
patent: 4790659 (1988-12-01), Erman et al.
Neal, W. E. J. et al., "Ellipsometry and its applications to surface examination" Journal of Physics E: Scientific Instruments 1973, vol. 6, p. 409.
Thompkins, H. G. "A User's Guide to Ellipsometry" pp. 40-45.
Kruger Albrecht
Richter Uwe
Wielsch Uwe
Witek Helmut
Pham Hoa Q.
Sentech Instruments GmbH
LandOfFree
Method for the determination of characteristic values of transpa does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for the determination of characteristic values of transpa, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for the determination of characteristic values of transpa will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-356797