Method for supporting a wafer in a combined wafer support and te

Details Method for supporting a wafer in a combined wafer support and te Method for supporting a wafer in a combined wafer support and te

1994-09-20

1996-10-22

Jordan, Charles T.

Batteries: thermoelectric and photoelectric

Thermoelectric

Processes

136221, 136230, 136231, 374179, 374208, H01L 3534

Patent

active

055679099

ABSTRACT:
A combined wafer support and thermocouple assembly comprising a wafer support basket having a plurality of wafer support fingers, one of which includes a low mass, low heat constant support for supporting a thermocouple against the backside of a wafer positioned on the basket.

REFERENCES:
patent: 4091673 (1978-05-01), Tamura et al.
patent: 4527005 (1985-07-01), McKelvey et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 5098198 (1992-03-01), Nulman et al.
patent: 5106200 (1992-04-01), Hosokawa
patent: 5356486 (1994-10-01), Sugarman et al.
Omego Technologies Company, The Temperature Handbook, 1989, pp. A-31, A-42, Z-33 and Z-45.

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