Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2006-04-18
2010-06-08
Chen, Bret (Department: 1792)
Coating processes
Coating by vapor, gas, or smoke
C427S578000, C156S345510, C156S391000, C118S7230AN, C118S728000
Reexamination Certificate
active
07732010
ABSTRACT:
A method for supporting a glass substrate comprising providing a substrate support having an aluminum body, a substrate contact area formed on the surface of the substrate support, wherein the process of forming the substrate contact area comprises forming an anodization layer on a surface region of the aluminum body, the coating having a thickness of between about 0.3 mils and about 2.16 mils, wherein the surface region substantially corresponds to the substrate contact area, and preparing the anodization layer disposed over the surface region to a surface roughness between about 88 micro-inches and about 230 micro-inches, followed by anodizing the substrate surface to said thickness, positioning the substrate support adjacent a substrate processing region in a substrate processing chamber, wherein the substrate contact area is adjacent the substrate processing region, positioning the glass substrate on the substrate contact area.
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Choi Soo Young
Greene Robert I.
Law Kam
Park Beom Soo
Park Chung-Hee
Applied Materials Inc.
Chen Bret
Patterson & Sheridan LLP
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