Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate
2006-02-03
2010-06-15
Webb, Gregory E (Department: 1796)
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
For cleaning a specific substrate or removing a specific...
C510S417000
Reexamination Certificate
active
07737097
ABSTRACT:
A method is provided for removing contamination from a substrate. The method includes applying a cleaning solution having a dispersed phase, a continuous phase and particles dispersed within the continuous phase to a surface of the substrate. The method includes forcing one of the particles dispersed within the continuous phase proximate to one of the surface contaminants. The forcing is sufficient to overcome any repulsive forces between the particles and the surface contaminants so that the one of the particles and the one of the surface contaminants are engaged. The method also includes removing the engaged particle and surface contaminant from the surface of the substrate. A process to manufacture the cleaning material is also provided.
REFERENCES:
patent: 3037887 (1962-06-01), Brenner et al.
patent: 3212762 (1965-10-01), Carroll et al.
patent: 3436262 (1969-04-01), Crowe et al.
patent: 3617095 (1971-11-01), Lissant
patent: 3978176 (1976-08-01), Voegeli
patent: 4085059 (1978-04-01), Smith et al.
patent: 4133773 (1979-01-01), Simmons
patent: 4156619 (1979-05-01), Griesshammer
patent: 4235794 (1980-11-01), Rieber et al.
patent: 4238244 (1980-12-01), Banks
patent: 4753747 (1988-06-01), Clark et al.
patent: 4781764 (1988-11-01), Leenaars
patent: 4817652 (1989-04-01), Liu et al.
patent: 4838289 (1989-06-01), Kottman et al.
patent: 4849027 (1989-07-01), Simmons
patent: 4911761 (1990-03-01), McConnell et al.
patent: 4962776 (1990-10-01), Liu et al.
patent: 5000795 (1991-03-01), Chung et al.
patent: 5048549 (1991-09-01), Hethcoat
patent: 5102777 (1992-04-01), Lin et al.
patent: 5105556 (1992-04-01), Kurokawa et al.
patent: 5113597 (1992-05-01), Sylla
patent: 5175124 (1992-12-01), Winebarger
patent: 5181985 (1993-01-01), Lampert et al.
patent: 5196183 (1993-03-01), Yudelson et al.
patent: 5226969 (1993-07-01), Watanabe et al.
patent: 5242669 (1993-09-01), Flor
patent: 5271774 (1993-12-01), Leenaars et al.
patent: 5288332 (1994-02-01), Pustilnik et al.
patent: 5306350 (1994-04-01), Hoy et al.
patent: 5336371 (1994-08-01), Chung et al.
patent: 5415191 (1995-05-01), Mashimo et al.
patent: 5417768 (1995-05-01), Smith et al.
patent: 5464480 (1995-11-01), Matthews
patent: 5472502 (1995-12-01), Batchelder
patent: 5494526 (1996-02-01), Paranjpe
patent: 5498293 (1996-03-01), Ilardi et al.
patent: 5634979 (1997-06-01), Carlson et al.
patent: 5637317 (1997-06-01), Dietl
patent: 5656097 (1997-08-01), Olesen et al.
patent: 5660642 (1997-08-01), Britten
patent: 5705223 (1998-01-01), Bunkofske
patent: 5726138 (1998-03-01), Tsaur et al.
patent: 5800626 (1998-09-01), Cohen et al.
patent: 5858283 (1999-01-01), Burris
patent: 5900191 (1999-05-01), Gray et al.
patent: 5904156 (1999-05-01), Advocate, Jr. et al.
patent: 5908509 (1999-06-01), Olesen et al.
patent: 5911837 (1999-06-01), Matthews
patent: 5932493 (1999-08-01), Akatsu et al.
patent: 5944581 (1999-08-01), Goenka
patent: 5944582 (1999-08-01), Talieh
patent: 5945351 (1999-08-01), Mathuni
patent: 5951779 (1999-09-01), Koyanagi et al.
patent: 5964954 (1999-10-01), Matsukawa et al.
patent: 5964958 (1999-10-01), Ferrell et al.
patent: 5968285 (1999-10-01), Ferrell et al.
patent: 5997653 (1999-12-01), Yamasaka
patent: 6048409 (2000-04-01), Kanno et al.
patent: 6049996 (2000-04-01), Freeman et al.
patent: 6069119 (2000-05-01), Robinson et al.
patent: 6081650 (2000-06-01), Lyons et al.
patent: 6090217 (2000-07-01), Kittle
patent: 6092538 (2000-07-01), Arai et al.
patent: 6152805 (2000-11-01), Takahashi
patent: 6153015 (2000-11-01), Geldner et al.
patent: 6158445 (2000-12-01), Olesen et al.
patent: 6167583 (2001-01-01), Miyashita et al.
patent: 6190738 (2001-02-01), Beck
patent: 6228563 (2001-05-01), Starove et al.
patent: 6267125 (2001-07-01), Bergman et al.
patent: 6270584 (2001-08-01), Ferrell et al.
patent: 6272712 (2001-08-01), Gockel et al.
patent: 6276459 (2001-08-01), Herrick et al.
patent: 6286231 (2001-09-01), Bergman et al.
patent: 6290780 (2001-09-01), Ravkin
patent: 6296715 (2001-10-01), Kittle
patent: 6319801 (2001-11-01), Wake et al.
patent: 6352082 (2002-03-01), Mohindra et al.
patent: 6386956 (2002-05-01), Sato et al.
patent: 6398975 (2002-06-01), Mertens et al.
patent: 6401734 (2002-06-01), Morita et al.
patent: 6423148 (2002-07-01), Aoki
patent: 6439247 (2002-08-01), Kittle
patent: 6457199 (2002-10-01), Frost et al.
patent: 6491043 (2002-12-01), Mohindra et al.
patent: 6491764 (2002-12-01), Mertens et al.
patent: 6493902 (2002-12-01), Lin
patent: 6513538 (2003-02-01), Chung et al.
patent: 6514921 (2003-02-01), Kakizawa
patent: 6527870 (2003-03-01), Gotikis
patent: 6532976 (2003-03-01), Huh et al.
patent: 6537915 (2003-03-01), Moore et al.
patent: 6562726 (2003-05-01), Torek et al.
patent: 6576066 (2003-06-01), Namatsu
patent: 6594847 (2003-07-01), Krusell et al.
patent: 6616772 (2003-09-01), de Larios et al.
patent: 6733596 (2004-05-01), Mikhaylichenko et al.
patent: 6787473 (2004-09-01), Andreas
patent: 6797071 (2004-09-01), Kittle
patent: 6802911 (2004-10-01), Lee et al.
patent: 6846380 (2005-01-01), Dickinson et al.
patent: 6851435 (2005-02-01), Mertens et al.
patent: 6874516 (2005-04-01), Matsuno et al.
patent: 6896826 (2005-05-01), Wojtczak et al.
patent: 6927176 (2005-08-01), Verhaverbeke et al.
patent: 6946396 (2005-09-01), Miyazawa et al.
patent: 6951042 (2005-10-01), Mikhaylichenko et al.
patent: 7122126 (2006-10-01), Fuentes
patent: 2002/0072482 (2002-06-01), Sachdev et al.
patent: 2002/0094684 (2002-07-01), Hirasaki et al.
patent: 2002/0121290 (2002-09-01), Tang et al.
patent: 2002/0185164 (2002-12-01), Tetsuka et al.
patent: 2002/0195121 (2002-12-01), Kittle
patent: 2003/0075204 (2003-04-01), de Larios et al.
patent: 2003/0148903 (2003-08-01), Bargaje et al.
patent: 2003/0171239 (2003-09-01), Patel et al.
patent: 2003/0226577 (2003-12-01), Orll et al.
patent: 2004/0002430 (2004-01-01), Verhaverbeke
patent: 2004/0053808 (2004-03-01), Raehse et al.
patent: 2004/0134515 (2004-07-01), Castrucci
patent: 2004/0159335 (2004-08-01), Montierth et al.
patent: 2004/0163681 (2004-08-01), Verhaverbeke
patent: 2004/0261823 (2004-12-01), de Larios
patent: 2005/0045209 (2005-03-01), Tan
patent: 2005/0132515 (2005-06-01), Boyd et al.
patent: 2005/0133060 (2005-06-01), de Larios et al.
patent: 2005/0133061 (2005-06-01), de Larios et al.
patent: 2005/0159322 (2005-07-01), Min et al.
patent: 2005/0176606 (2005-08-01), Konno et al.
patent: 2005/0183740 (2005-08-01), Fulton et al.
patent: 2006/0201267 (2006-09-01), Liu
patent: 2006/0283486 (2006-12-01), de Larios et al.
patent: 2006/0285930 (2006-12-01), de Larios et al.
patent: 2007/0000518 (2007-01-01), Korolik et al.
patent: 40-38-587 (1992-06-01), None
patent: 0827188 (1998-03-01), None
patent: 0905746 (1999-03-01), None
patent: 11-334874 (1999-12-01), None
patent: 0989600 (2000-03-01), None
patent: 553679 (1943-06-01), None
patent: 636878 (1950-05-01), None
patent: 1388871 (1975-03-01), None
patent: 53-076559 (1978-07-01), None
patent: 56-084618 (1981-07-01), None
patent: 56-084619 (1981-07-01), None
patent: 59-24849 (1984-02-01), None
patent: 60-005529 (1985-01-01), None
patent: 62-119543 (1987-05-01), None
patent: 63-077510 (1988-04-01), None
patent: 02-309638 (1990-12-01), None
patent: 5-15857 (1993-01-01), None
patent: 06-177101 (1994-06-01), None
patent: 07-006993 (1995-01-01), None
patent: 11-350169 (1999-12-01), None
patent: 2001-064688 (2001-03-01), None
patent: 2002-66475 (2002-03-01), None
patent: 2002-280330 (2002-09-01), None
patent: 2002-309638 (2002-10-01), None
patent: 2003-282513 (2003-10-01), None
patent: 2005-194294 (2005-07-01), None
patent: WO-99/16109 (1999-04-01), None
patent: WO-00/33980 (2000-06-01), None
patent: WO-00/59006 (2000-10-01), None
patent: WO-01/12384 (2001-02-01), None
patent: WO-02/101795 (2002-12-01), None
patent: WO-2005/006424 (2005-01-01), None
patent: WO 2005/064647 (2005-07-01), None
Aubert, JM et al.; “Aqueous foams”; Scientific America; 1986, 74-82, 254.
Kittle, et al.; “Semiconductor Wafer Cleaning and Drying Using a Foam Medium”; <hhttp://www.aquafoam.com/papers;SCI0202.pdf>; Sematech Novel Wafer Cleans
de Larios John M.
Freer Erik M.
Korolik Mikhail
Mikhaylichenko Katrina
Ravkin Michael
Lam Research Corporation
Martine & Penilla & Gencarella LLP
Webb Gregory E
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