Method for reducing stray light in a rapid thermal...

Electric heating – Heating devices – Combined with container – enclosure – or support for material...

Reexamination Certificate

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Details

C219S405000, C219S411000, C219S390000, C219S121600, C219S121740, C219S121780, C219S121820, C118S724000, C118S725000, C118S050100, C392S416000, C392S418000

Reexamination Certificate

active

07985945

ABSTRACT:
Embodiments of the present invention provide apparatus and method for reducing noises in temperature measurement during thermal processing. One embodiment of the present invention provides a chamber for processing a substrate comprising a chamber enclosure defining a processing volume, an energy source configured to direct radiant energy toward the processing volume, a spectral device configured to treat the radiant energy directed from the energy source towards the processing volume, a substrate support disposed in the processing volume and configured to support the substrate during processing, and a sensor assembly configured to measure temperature of the substrate being processed by sensing radiation from the substrate within a selected spectrum.

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patent: 7269343 (2007-09-01), Koren et al.
patent: 7358462 (2008-04-01), Timans
patent: 2006/0289434 (2006-12-01), Timans

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