Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2011-07-26
2011-07-26
Fuqua, Shawntina (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S405000, C219S411000, C219S390000, C219S121600, C219S121740, C219S121780, C219S121820, C118S724000, C118S725000, C118S050100, C392S416000, C392S418000
Reexamination Certificate
active
07985945
ABSTRACT:
Embodiments of the present invention provide apparatus and method for reducing noises in temperature measurement during thermal processing. One embodiment of the present invention provides a chamber for processing a substrate comprising a chamber enclosure defining a processing volume, an energy source configured to direct radiant energy toward the processing volume, a spectral device configured to treat the radiant energy directed from the energy source towards the processing volume, a substrate support disposed in the processing volume and configured to support the substrate during processing, and a sensor assembly configured to measure temperature of the substrate being processed by sensing radiation from the substrate within a selected spectrum.
REFERENCES:
patent: 5154512 (1992-10-01), Schietinger et al.
patent: 6179466 (2001-01-01), Peuse et al.
patent: 6835914 (2004-12-01), Timans
patent: 7015422 (2006-03-01), Timans
patent: 7056389 (2006-06-01), Hauf et al.
patent: 7109443 (2006-09-01), Knutson et al.
patent: 7135656 (2006-11-01), Timans
patent: 7226488 (2007-06-01), Gat
patent: 7269343 (2007-09-01), Koren et al.
patent: 7358462 (2008-04-01), Timans
patent: 2006/0289434 (2006-12-01), Timans
Hunter Aaron
Koelmel Blake
Ranish Joseph Michael
Applied Materials Inc.
Fuqua Shawntina
Patterson & Sheridan L.L.P.
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