Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2006-09-28
2009-10-06
Lindsay, Jr., Walter L (Department: 2812)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
Reexamination Certificate
active
07598130
ABSTRACT:
A method for forming an integrated circuit includes providing a semiconductor substrate, forming a re-implantation blocking layer over the semiconductor substrate, forming a mask over the re-implantation blocking layer, patterning the mask to form an opening, wherein a portion of the re-implantation blocking layer is exposed through the opening, performing an implantation to introduce an impurity into a portion of the semiconductor substrate underlying the opening to form a well region, removing the mask, and removing the re-implantation blocking layer.
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Sheu Yi-Ming
Yang Chung-Heng
Yang Sheng-Jier
Lindsay, Jr. Walter L
Slater & Matsil L.L.P.
Stevenson Andre′ C
Taiwan Semiconductor Manufacturing Company , Ltd.
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