Method for programming single-poly EPROM at low operation...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S197000, C438S257000

Reexamination Certificate

active

06930002

ABSTRACT:
A method for programming a single-poly EPROM cell at relatively low operation voltages (±Vcc) is disclosed. According to this invention, the single-poly EPROM cell includes a P-channel floating-gate transistor formed on an N well of a P type substrate, and an N-channel coupling device. The P-channel floating-gate transistor has a P+doped drain, P+doped source, a P channel defined between the P+doped drain and P+doped source, a tunnel oxide layer on the P channel, and a floating doped poly gate disposed on the tunnel oxide layer. The N-channel coupling device includes a floating poly electrode, which is electrically connected to the floating doped poly gate of the P-channel floating-gate transistor, and is capacitively coupled to a control region doped in the P type substrate.

REFERENCES:
patent: 6329240 (2001-12-01), Hsu et al.
patent: 6509606 (2003-01-01), Merrill et al.
patent: 6785165 (2004-08-01), Kawahara et al.
patent: 6808169 (2004-10-01), Hsu et al.

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