Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1992-01-06
1993-06-29
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
G03F 730, G03F 7021, G03C 754
Patent
active
052233766
ABSTRACT:
A method for producing fine patterns is disclosed, comprising spin-coating a photosensitive resin solution as an upper layer, which comprises a diazonium salt as a photobleachable agent, water and/or an organic solvent, and a polymer, on a photoresist layer as a lower layer and then light-exposing both the upper layer and the lower layer, wherein the polymer in the upper layer has a structural unit shown by formula (I): ##STR1## wherein R.sub.1, R.sub.2, and R.sub.3 each represents a hydrogen atom, an alkyl group having from 1 to 4 carbon atoms, a halogen atom, or a nitrile group; R.sub.4 represents a hydrogen atom, an alkyl group having from 1 to 4 carbon atoms, a halogen atom, a hydroxyl group, or a carboxyl group; and X represents a hydrogen atom, an alkali metal, an alkaline earth metal, or an ammonium group.
According to another embodiment of this invention, a method for producing fine patterns is disclosed, comprising spin-coating a photosensitive resin solution as an upper layer, which comprises a diazonium salt as a photobleachable agent, water and/or an organic solvent, and a polymer, on a photoresist layer as a lower layer, wherein a counter anion of the diazonium salt is a functional group of the polymer in the photosensitive resin.
According to this invention, a light of low contrast can be increased to one of high contrast without requiring complicated steps, and patterns of less than 1 .mu.m can be produced with good precision.
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Fukuda Mitsutoshi
Hasegawa Masazumi
Todoko Masaaki
Bowers Jr. Charles L.
Toyo Soda Manufacturing Co. Ltd.
Young Christopher G.
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