Method for producing disk-recording plates

Details Method for producing disk-recording plates Method for producing disk-recording plates

1979-04-24

1981-03-31

Kimlin, Edward C.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Electron beam imaging

156643, 156646, 1566591, 204192EC, 204192E, 427 531, 430320, 430323, 430326, 430394, 430945, G03C 500

Patent

active

042594332

ABSTRACT:
A disk-recording plate is produced by successively forming an etching layer and a laser-sensitive layer on a substrate. The assembly is exposed to the irradiation of laser beams to selectively remove the laser-sensitive layer and is then subjected to a sputter-etching treatment in an atmosphere of a reactive gas to remove the etching layer at portions corresponding to the removed portions of the laser-sensitive layer. The method permits monitoring of recording, and thus ensures accurate recording with good resolution.

REFERENCES:
patent: 3256524 (1966-06-01), Stauffer
patent: 3560994 (1971-02-01), Wolff et al.
patent: 3668028 (1972-06-01), Short
patent: 3867217 (1975-02-01), Maggs et al.
patent: 3924093 (1975-12-01), Feldman et al.
patent: 3957609 (1976-05-01), Sasano et al.
patent: 3990084 (1976-11-01), Hamisch et al.
patent: 4000492 (1976-12-01), Willens
patent: 4026742 (1977-05-01), Fujino
patent: 4030967 (1977-06-01), Ingmey
patent: 4057831 (1977-11-01), Jacobs et al.

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