Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Patent
1998-03-18
1998-12-29
McPherson, John A.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
216 2, 216 26, H01L 2714, H01L 310304
Patent
active
058539603
ABSTRACT:
The invention relates to a method for fabricating III-V semiconductor micro-optical lenses for hybrid integration with micro-optical devices, where a micro-optical lens is formed from a semiconductor wafer by selectively etching a surface of the semiconductor wafer and a lens arm is formed from the semiconductor wafer on a surface opposite the surface by selectively etching the surface of the semiconductor wafer. The lens and lens arm are then cleaved from the substrate wafer and directly mounted to a micro-optical device. As a result of using III-V semiconductor material to form micro-optical lenses for hybrid integration to micro-optical devices of the same semiconductor material, thermal expansion stability is increased and efficient transfer of light between micro-optical lenses and micro-optical devices is achieved.
REFERENCES:
patent: 5018164 (1991-05-01), Brewer et al.
patent: 5316640 (1994-05-01), Wakabayshi et al.
patent: 5346583 (1994-09-01), Basavanhally
Photoelectrochemical etching of integral lenses on lnGaAs/InP light-emitting diodes, Appl. Phys. Lett. 43 pp. 624-644, Oct. 1983.
Small-Junction-Area GalnAs/InP pin Photodiode with Monolithic Microlens, Electronics Letters vol.24 No.2 pp. 109-110, Jan. 1988.
Microsystems and Waferprocesses for Volumeproduction of Highly Reliable Fiber Optic Components for Telecom-and Datacom-Application, IEEE Electronic Components and Technology Conference pp. 7-15, 1997.
Micromirror arrays using KOH:H.sub.2 O micromachining of silicon for lens templates, geodesic lenses, and other applications, Optical Engineering vol. 33 No. 11 pp. 3578-3587, Nov. 1994.
Preshaping photoresist for refractive microlens fabrication, Optical Engineering vol. 33 No. 11 pp. 3552-3555, Nov. 1994.
Technique for monolithic fabrication of silicon microlenses with selectable rim angles, Optical Engineering vol. 33 No. 11 pp. 1095-1098, Apr. 1997.
Dry etching for coherent refractive microlens arrays, Optical Engineering vol. 33 No. 11 pp. 3547-3551, Nov. 1994.
Mass-transport fabrication of large-numerical-aperature microoptics, SPIE vol. 2383 pp. 310-317, Feb. 1995.
Anderson Eric R.
Rezek Edward A.
Strijek Ronald L.
Tran Dean
McPherson John A.
TRW Inc.
Yatsko Michael S.
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