Method for patterning cationic curable photoresist

Details Method for patterning cationic curable photoresist Method for patterning cationic curable photoresist

1988-12-30

1990-07-10

Brammer, Jack P.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430280, 430945, G03C 500

Patent

active

049406515

ABSTRACT:
Cationic curable photoresists are patterned by exposing such to a laser beam in a pattern, followed by developing.

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