Method for normalizing the detection signals of magnified images

Details Method for normalizing the detection signals of magnified images Method for normalizing the detection signals of magnified images

1988-02-25

1989-12-05

McGraw, Vincent P.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356387, 2504591, G01B 1102

Patent

active

048848905

ABSTRACT:
A feedback method, or automatic gain control circuit, for an image photosensor at the focal plane of an optical system for very narrow linewidth measurements of images having varying intensities such as fluorescing photoresist coated lines. The feedback method includes the steps of measuring the instantaneous intensities of the entire optical beam of radiation with a photodetector and applying the output therefrom to the photosensor to thus normalize its output signal.

REFERENCES:
patent: 3643101 (1972-02-01), Shipp et al.
patent: 4050821 (1977-09-01), Cuthbert et al.
patent: 4373817 (1983-02-01), Coates
"Critical-Dimension Control in the Late Eighties", Toro-Lira et al., Microelectronic Manufacturing and Testing, vol. 8, No. 1, 1-1985, 1-14.
"Evaluating Optical Linewidth Measurement Systems", 7-1986.

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