Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2007-08-06
2010-11-23
Richards, N Drew (Department: 2895)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S629000, C438S637000, C438S643000, C438S644000
Reexamination Certificate
active
07838414
ABSTRACT:
A semiconductor device is manufactured by forming a low dielectric constant layer on a semiconductor substrate which is formed with metal lines; implementing primary ultraviolet treatment of the low dielectric constant layer; forming a capping layer on the low dielectric constant layer having undergone the primary ultraviolet treatment; and implementing secondary ultraviolet treatment of the low dielectric constant layer including the capping layer.
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An Hyeon Ju
Chung Chae O
Kim Chan Bae
Lee Hyo Seok
Lee Jong Min
Garcia Joannie A
Hynix / Semiconductor Inc.
Ladas & Parry LLP
Richards N Drew
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