Method for manufacturing semiconductor device

Details Method for manufacturing semiconductor device Method for manufacturing semiconductor device

2008-04-15

2008-04-15

Rose, Kiesha (Department: 4176)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S197000, C438S589000

Reexamination Certificate

active

11401891

ABSTRACT:
A method for manufacturing a semiconductor device includes expanding an active region and a recess region by an epitaxial growth process. As a result, a margin is sufficiently secured in processes for forming a device isolation film that defines the active region and for expanding a recess region to form a bulb recess region.

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